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Through-membrane electron-beam lithography for ultrathin membrane applications

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 Added by Stephanie Heerema
 Publication date 2017
  fields Physics
and research's language is English




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We present a technique to fabricate ultrathin (down to 20 nm) uniform electron transparent windows at dedicated locations in a SiN membrane for in situ transmission electron microscopy experiments. An electron-beam (e-beam) resist is spray-coated on the backside of the membrane in a KOH- etched cavity in silicon which is patterned using through-membrane electron-beam lithography. This is a controlled way to make transparent windows in membranes, whilst the topside of the membrane remains undamaged and retains its flatness. Our approach was optimized for MEMS-based heating chips but can be applied to any chip design. We show two different applications of this technique for (1) fabrication of a nanogap electrode by means of electromigration in thin free-standing metal films and (2) making low-noise graphene nanopore devices.



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156 - Q. Yang , Y. Su , C. Chi 2017
Graphene oxide (GO) membranes continue to attract intense interest due to their unique molecular sieving properties combined with fast permeation rates. However, the membranes use has been limited mostly to aqueous solutions because GO membranes appear to be impermeable to organic solvents, a phenomenon not fully understood yet. Here, we report efficient and fast filtration of organic solutions through GO laminates containing smooth two-dimensional (2D) capillaries made from flakes with large sizes of ~ 10-20 micron. Without sacrificing their sieving characteristics, such membranes can be made exceptionally thin, down to ~ 10 nm, which translates into fast permeation of not only water but also organic solvents. We attribute the organic solvent permeation and sieving properties of ultrathin GO laminates to the presence of randomly distributed pinholes that are interconnected by short graphene channels with a width of 1 nm. With increasing the membrane thickness, the organic solvent permeation rates decay exponentially but water continues to permeate fast, in agreement with previous reports. The application potential of our ultrathin laminates for organic-solvent nanofiltration is demonstrated by showing >99.9% rejection of various organic dyes with small molecular weights dissolved in methanol. Our work significantly expands possibilities for the use of GO membranes in purification, filtration and related technologies.
Transport of liquid mixtures through porous membranes is central to processes such as desalination, chemical separations and energy harvesting, with ultrathin membranes made from novel 2D nanomaterials showing exceptional promise. Here we derive, for the first time, general equations for the solution and solute fluxes through a circular pore in an ultrathin planar membrane induced by a solute concentration gradient. We show that the equations accurately capture the fluid fluxes measured in finite-element numerical simulations for weak solute-membrane interactions. We also derive scaling laws for these fluxes as a function of the pore size and the strength and range of solute-membrane interactions. These scaling relationships differ markedly from those for concentration-gradient-driven flow through a long cylindrical pore or for flow induced by a pressure gradient or electric field through a pore in an ultrathin membrane. These results have broad implications for transport of liquid mixtures through membranes with a thickness on the order of the characteristic pore size.
Coupled nanomechanical resonators are interesting for both fundamental studies and practical applications as they offer rich and tunable oscillation dynamics. At present, the mechanical coupling in such systems is often mediated by a fixed geometry, such as a joint clamping point of the resonators or a displacement-dependent force. Here we show a graphene-integrated electromechanical system consisting of two physically separated mechanical resonators -- a comb-drive actuator and a suspended silicon beam -- that are tunably coupled by a graphene membrane. The graphene membrane, moreover, provides a sensitive electrical read-out for the two resonating systems silicon structures showing 16 different modes in the frequency range from 0.4~to 24~MHz. In addition, by pulling on the graphene membrane with an electrostatic potential applied to one of the silicon resonators, we control the mechanical coupling, quantified by the $g$-factor, from 20 kHz to 100 kHz. Our results pave the way for coupled nanoelectromechanical systems requiring controllable mechanically coupled resonators.
A new method to fabricate non-superconducting mesoscopic tunnel junctions by oxidation of Ti is presented. The fabrication process uses conventional electron beam lithography and shadow deposition through an organic resist mask. Superconductivity in Ti is suppressed by performing the deposition under a suitable background pressure. We demonstrate the method by making a single electron transistor which operated at $T < 0.4$ K and had a moderate charge noise of $2.5 times 10^{-3}$ e/$sqrt{mathrm{Hz}}$ at 10 Hz. Based on nonlinearities in the current-voltage characteristics at higher voltages, we deduce the oxide barrier height of approximately 110 mV.
The van der Waals interaction between a lipid membrane and a substrate covered by a graphene sheet is investigated using the Lifshitz theory. The reflection coefficients are obtained for a layered planar system submerged in water. The dielectric response properties of the involved materials are also specified and discussed. Our calculations show that a graphene covered substrate can repel the biological membrane in water. This is attributed to the significant changes in the response properties of the system due to the monolayer graphene. It is also found that the van der Waals interaction is mostly dominated by the presence of graphene, while the role of the particular substrate is secondary.
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