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Intrinsic resolving power of XUV diffraction gratings measured with Fizeau interferometry

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 Added by Peter Abbamonte
 Publication date 2017
  fields Physics
and research's language is English




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We introduce a method for using Fizeau interferometry to measure the intrinsic resolving power of a diffraction grating. This method is more accurate than traditional techniques based on a long-trace profiler (LTP), since it is sensitive to long-distance phase errors not revealed by a d-spacing map. We demonstrate 50,400 resolving power for a mechanically ruled XUV grating from Inprentus, Inc.



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