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Monte Carlo analysis of a lateral IBIC experiment on a 4H-SiC Schottky diode

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 Added by Paolo Olivero
 Publication date 2016
  fields Physics
and research's language is English




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The transport properties of a 4H-SiC Schottky diode have been investigated by the Ion Beam Induced Charge (IBIC) technique in lateral geometry through the analysis of the charge collection efficiency (CCE) profile at a fixed applied reverse bias voltage. The cross section of the sample orthogonal to the electrodes was irradiated by a rarefied 4 MeV proton microbeam and the charge pulses have been recorded as function of incident proton position with a spatial resolution of 2 um. The CCE profile shows a broad plateau with CCE values close to 100% occurring at the depletion layer, whereas in the neutral region, the exponentially decreasing profile indicates the dominant role played by the diffusion transport mechanism. Mapping of charge pulses was accomplished by a novel computational approach, which consists in mapping the Gunns weighting potential by solving the electrostatic problem by finite element method and hence evaluating the induced charge at the sensing electrode by a Monte Carlo method. The combination of these two computational methods enabled an exhaustive interpretation of the experimental profiles and allowed an accurate evaluation both of the electrical characteristics of the active region (e.g. electric field profiles) and of basic transport parameters (i. e. diffusion length and minority carrier lifetime).



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We report the time resolution of 100 $rm mu m$ 4H-SiC PIN detectors which are fabricated by Nanjing University (NJU). The time responses for $rm beta$ particle from $rm ^{90}$Sr source are investigated for the detection of the minimum ionizing particles (MIPs). The influences of different reverse voltages which correspond to carrier velocity and device sizes which correlate with capacitance for time resolution are studied. We acquired a time resolution (94$pm$1) ps for 100 $rm mu m$ 4H-SiC PIN detector. A fast simulation software - RASER (RAdiation SEmiconductoR) has been developed to simulate the time resolution of 4H-SiC detector, and the simulation has been validated by the waveform comparison of RASER simulation and measured data. The simulated time resolution is (53 $pm$ 1) ps after consider the intrinsic leading contributions of detector in time resolution.
In order to evaluate the charge collection efficiency (CCE) profile of single-crystal diamond devices based on a p type/intrinsic/metal configuration, a lateral Ion Beam Induced Charge (IBIC) analysis was performed over their cleaved cross sections using a 2 MeV proton microbeam. CCE profiles in the depth direction were extracted from the cross-sectional maps at variable bias voltage. IBIC spectra relevant to the depletion region extending beneath the frontal Schottky electrode show a 100% CCE, with a spectral resolution of about 1.5%. The dependence of the width of the high efficiency region from applied bias voltage allows the constant residual doping concentration of the active region to be evaluated. The region where the electric field is absent shows an exponentially decreasing CCE profile, from which it is possible to estimate the diffusion length of the minority carriers by means of a drift-diffusion model.
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