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Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics

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 Added by Vladimir Yuryev
 Publication date 2011
  fields Physics
and research's language is English




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Some possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materials and structures are discussed in the paper. The conclusion is made that the techniques in question might be very useful for solving a large number of problems regarding defect investigations and quality monitoring both in research laboratories and the industry of microelectronics



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The scanning mid-IR-laser microscopy was previously demonstrated as an effective tool for characterization of different semiconductor crystals. Now the technique has been successfully applied for the investigation of CZ Si$_x$Ge$_{1-x}$---a promising material for photovoltaics---and multicrystalline silicon for solar cells.
Non-destructive determination of lithium distribution in a working battery is key for addressing both efficiency and safety issues. Although various techniques have been developed to map the lithium distribution in electrodes, these methods are mostly applicable to test cells. Here we propose the use of high-energy x-ray Compton scattering spectroscopy to measure the local lithium concentration in closed electrochemical cells. A combination of experimental measurements and parallel first-principles computations is used to show that the shape parameter S of the Compton profile is linearly proportional to lithium concentration and thus provides a viable descriptor for this important quantity. The merits and applicability of our method are demonstrated with illustrative examples of LixMn2O4 cathodes and a working commercial lithium coin battery CR2032.
Sn-containing Si and Ge alloys belong to an emerging family of semiconductors with the potential to impact group IV semiconductor devices. Indeed, the ability to independently engineer both lattice parameter and band gap holds the premise to develop enhanced or novel photonic, optoelectronic, and electronic devices. With this perspective, we present detailed investigations of the influence of Ge1-y-xSixSny layers on the optical properties of Si- and Ge-based heterostructures and nanowires. We found that adding a thin Ge1-x-ySixSny capping layer on Si or Ge greatly enhances light absorption especially in the near IR range leading to an increase in short-circuit current density. For the Ge1-y-xSixSny structure at thicknesses below 30 nm, a 14-fold increase in the short-circuit current is predicted with respect to bare Si. This enhancement decreases by reducing the capping layer thickness. Conversely, decreasing the shell thickness was found to improve the short-circuit current in Si/Ge1-y-xSixSny and Ge/Ge1-y-xSixSny core/shell nanowires. The optical absorption becomes very important when increasing the Sn content. Moreover, by exploiting optical antenna effect, these nanowires show an extreme light absorption reaching an enhancement factor, with respect to Si or Ge nanowires, on the order of ~104 in Si/Ge0.84Si0.04Sn0.12 and ~12 in Ge/Ge0.84Si0.04Sn0.12 core/shell nanowires. Furthermore, we analyzed the optical response of the addition of a dielectric capping layer consisting of Si3N4 to the Si/Ge1-y-xSixSny core-shell nanowire and found about 50% increase in short-circuit current density for a dielectric layer thickness of 45 nm and a core radius and shell thickness superior to 40 nm. The core/shell optical antenna benefits from a multiplication of enhancements contributed by leaky mode resonances in the semiconductor part and antireflection effects in the dielectric part.
Hybrid nanophotonics based on metal-dielectric nanostructures unifies the advantages of plasmonics and all-dielectric nanophotonics providing strong localization of light, magnetic optical response and specifically designed scattering properties. Here we demonstrate a novel approach for fabrication of ordered hybrid nanostructures via femtosecond laser melting of asymmetrical metal-dielectric (Au-Si) nanoparticles created by lithographical methods. The approach allows selective reshaping of the metal components of the hybrid nanoparticles without affecting dielectric ones. We apply the developed approach for tuning of the hybrid nanostructures scattering properties in the visible range. The experimental results are supported by molecular dynamics simulation and numerical solving of Maxwell equations.
A simple theory is developed for an interpretation of the time-domain Brillouin scattering experiments where the coherent acoustic pulse and the probe light pulse beams are propagating at an angle to each other. The directivity pattern of their acousto-optic interaction in case of heterodyne detection of the acoustically scattered probe light (in nearly backward direction to the probe light) is predicted. The theory reveals the dependences of carrier frequency and duration of acoustically induced wave packets in the transient reflectivity signals, on the widths of light and sound beams, and on the angle of their relative propagation (interaction angle). It also describes the transient dynamics of these wave packets when the probe light and the coherent acoustic pulses are incident on material interfaces (inter-grain boundaries) and Brillouin scattering by incident acoustic field is transformed into Brillouin scattering by the reflected and transmitted (refracted) acoustic fields. In general, these transformations are accompanied by the modifications of the interaction angles between the coherent acoustic pulses and probe light beams. The sensitivities of the carrier frequencies and wave packet amplitudes in the reflected/transmitted beams to the angle of the beams incidence on the interface are evaluated and compared. The theory confirms the expected possibility of strong and dominant reduction in the time-domain Brillouin scattering amplitude following the reflection/transmission processes for large interaction angles.
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