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Register a new userHigh Density out-of-Plane Microprobe Array
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EDA Publishing Association
Publication date
2008
fields
Informatics Engineering
and research's language is
English
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MEMS technology has been developed rapidly in the last few years. More and more special micro structures were discussed in several publications. However, all of the structures were produced by consist of the three fundamental structures, which included bridge, cantilever and membrane structures. Even the more complex structures were no exception. The cantilever with the property of simple design and easy fabrication among three kinds of fundamental structure, therefore, it was popular used in the design of MEMS device.
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Employing state-of-the-art molecular beam epitaxy techniques to grow thin, modulation-doped AlAs quantum wells, we have achieved a low temperature mobility of 5.5 m$^2$/Vs with out-of-plane occupation, an order of magnitude improvement over previous studies. However, due to the narrow well width, mobilities are still limited by scattering due to interface roughness disorder. We demonstrate the successful implementation of a novel technique utilizing thermally-induced, biaxial, tensile strain that forces electrons to occupy the out-of-plane valley in thicker quantum wells, reducing interface roughness scattering and allowing us to achieve mobilities as high as 8.8 m$^2$/Vs.
Reduced-Order Modelling of the Bending of an Array of An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupled-field FEM simulation.
The tolerancing process links the virtual and the real worlds. From the former, tolerances define a variational geometrical language (geometric parameters). From the latter, there are values limiting those parameters. The beginning of a tolerancing process is in this duality. As high precision assemblies cannot be analyzed with the assumption that form errors are negligible, we propose to apply this process to assemblies with form errors through a new way of allowing to parameterize forms and solve their assemblies. The assembly process is calculated through a method of allowing to solve the 3D assemblies of pairs of surfaces having form errors using a static equilibrium. We have built a geometrical model based on the modal shapes of the ideal surface. We compute for the completely deterministic contact points between this pair of shapes according to a given assembly process. The solution gives an accurate evaluation of the assembly performance. Then we compare the results with or without taking into account the form errors. When we analyze a batch of assemblies, the problem is to compute for the nonconformity rate of a pilot production according to the functional requirements. We input probable errors of surfaces (position, orientation, and form) in our calculus and we evaluate the quality of the results compared with the functional requirements. The pilot production then can or cannot be validated.
We present the QCD analysis of the out-of-event-plane momentum distribution in DIS events with high $p_t$ jets. The achieved accuracy allows the measurement of the running coupling and the study of non-perturbative effects, in particular the test of universality of power corrections in a new experimental regime.
This paper presents the fabrication process, characterization results and basic functionality of silicon microneedles array with biodegradable tips. In order to avoid the main problems related to silicon microneedles : broking of the top part of the needles inside the skin, a simple solution can be fabrication of microneedles array with biodegradable tips. The silicon microneedles array was fabricated by using reactive ion etching while the biodegradable tips were performed using and anodization process that generates selectively porous silicon only on the top part of the skin. The paper presents also the results of in vitro release of calcein using microneedles array with biodegradable tips
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