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Register a new userDesign And Fabrication of Condenser Microphone Using Wafer Transfer And Micro-electroplating Technique
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EDA Publishing Association
Publication date
2008
fields
Informatics Engineering
and research's language is
English
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A novel fabrication process, which uses wafer transfer and micro-electroplating technique, has been proposed and tested. In this paper, the effects of the diaphragm thickness and stress, the air-gap thickness, and the area ratio of acoustic holes to backplate on the sensitivity of the condenser microphone have been demonstrated since the performance of the microphone depends on these parameters. The microphone diaphragm has been designed with a diameter and thickness of 1.9 mm and 0.6 $mu$m, respectively, an air-gap thickness of 10 $mu$m, and a 24% area ratio of acoustic holes to backplate. To obtain a lower initial stress, the material used for the diaphragm is polyimide. The measured sensitivities of the microphone at the bias voltages of 24 V and 12 V are -45.3 and -50.2 dB/Pa (at 1 kHz), respectively. The fabricated microphone shows a flat frequency response extending to 20 kHz.
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The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.
The past few years have seen an increasing focus on energy harvesting issue, including power supply for portable electric devices. Utilize scavenging ambient energy from the environment could eliminate the need for batteries and increase portable device lifetimes indefinitely. In addition, through MEMS technology fabricated micro-generator could easy integrate with these small or portable devices. Several different ambient sources, including solar, vibration and temperature effect, have already exploited [1-3]. Each energy source should be used in suitable environment, therefore to produce maximum efficiency. In this paper, we present an acoustic wave actuated micro-generator for power system by using the energy of acoustic waves, such as the sound from human voices or speakerphone, to actuate a MEMS-type electromagnetic transducer. This provides a longer device lifetime and greater power system convenience. Moreover, it is convenient to integrate MEMS-based microgenerators with small or porta le devices
In this paper, we presented the design and development of a new integrated device for measuring heart rate using fingertip to improve estimating the heart rate. As heart related diseases are increasing day by day, the need for an accurate and affordable heart rate measuring device or heart monitor is essential to ensure quality of health. However, most heart rate measuring tools and environments are expensive and do not follow ergonomics. Our proposed Heart Rate Measuring (HRM) device is economical and user friendly and uses optical technology to detect the flow of blood through index finger. Three phases are used to detect pulses on the fingertip that include pulse detection, signal extraction, and pulse amplification. Qualitative and quantitative performance evaluation of the device on real signals shows accuracy in heart rate estimation, even under intense of physical activity. We compared the performance of HRM device with Electrocardiogram reports and manual pulse measurement of heartbeat of 90 human subjects of different ages. The results showed that the error rate of the device is negligible.
Using Rayleigh surface acoustic waves (SAW), the Youngs modulus, the density and the thickness of polycrystalline Silicon-Germanium (SiGe) films deposited on silicon and SiO2 were measured, in excellent agreement with theory. The dispersion curve of the propagating SAW is calculated with a Boundary Element Method (BEM)-Model based on Greens functions. The propagating SAW is generated with a nanosecond laser in a narrowband scheme projecting stripes from a mask on the surface of the sample. For this purpose a glass mask and a liquid crystal display (LCD) mask are used. The slope of the SAW is then measured using a probe beam setup. From the wavelength of the mask and the frequency of the measured SAW, the dispersion curve is determined point by point. Fitting the BEM-Model to the measured nonlinear dispersion curve provides several physical parameters simultaneously. In the present work this is demonstrated for the Youngs modulus, the density and the thickness of SiGe films. The results from the narrowband scheme measurement are in excellent agreement with separated measurements of the thickness (profilometer), the density (balance) and the Youngs modulus (nanoindenter).
Multilayered ceramic substrates with embedded micro patterns are becoming increasingly important, for example, in harsh environment electronics and microfluidic devices. Fabrication of these embedded micro patterns, such as micro channels, cavities and vias, is a challenge. This study focuses on the process of patterning micro features on ceramic green substrates using micro embossing. A ceramic green tape that possessed near-zero shrinkage in the x-y plane was used, six layers of which were laminated as the embossing substrate. The process parameters that impact on the pattern fidelity were investigated and optimized in this study. Micro features with line-width as small as several micrometers were formed on the ceramic green substrates. The dynamic thermo-mechanical analysis indicated that extending the holding time at certain temperature range would harden the green substrates with little effect on improving the embossing fidelity. Ceramic substrates with embossed micro patterns were obtain d after co-firing. The embedded micro channels were also obtained by laminating the green tapes on the embossed substrates.
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