The superfluid to Mott insulator transition in cavity polariton arrays is analyzed using the variational cluster approach, taking into account quantum fluctuations exactly on finite length scales. Phase diagrams in one and two dimensions exhibit important non-mean-field features. Single-particle excitation spectra in the Mott phase are dominated by particle and hole bands separated by a Mott gap. In contrast to Bose-Hubbard models, detuning allows for changing the nature of the bosonic particles from quasi-localized excitons to polaritons to weakly interacting photons. The Mott state with density one exists up to temperatures $T/ggtrsim0.03$, implying experimentally accessible temperatures for realistic cavity couplings $g$.
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