We have examined the effects of 20 keV electron irradiation on [-Cu(1)-O(1)-]n chain oxygen arrangements in oxygen deficient but otherwise twin-free YBa2Cu3O6+x single crystals. Comparison of polarized Raman spectra of non-irradiated and irradiated areas provides evidence that electron bombardments instigate the collective hopping of oxygen atoms either from an interstitial at O(5) site to a vacant O(1) chain site or by reshuffling the chain segments to extend the average length of chains without changing the overall oxygen content. This oxygen ordering effect, while counter-intuitive, is analogous to that found in the photoexcitation induced ordering in which temporal charge imbalance from electron-hole pair creation by inelastic scattering of incident electrons causes a local lattice distortion which brings on the atomic rearrangements.
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