How stellar mass assembles within galaxies is still an open question. We present measurements of the stellar mass distribution on kpc-scale for $sim5500$ galaxies with stellar masses above $log(M_{ast}/M_{odot})geqslant9.8$ up to the redshift $2.0$. We create stellar mass maps from Hubble Space Telescope observations by means of the pixel-by-pixel SED fitting method. These maps are used to derive radii encompassing $20%$, $50%$, and $80%$ ($r_{20}$, $r_{50}$ and $r_{80}$) of the total stellar mass from the best-fit Sersic models. The reliability and limitations of the structural parameter measurements are checked extensively using a large sample ($sim3000$) of simulated galaxies. The size-mass relations and redshift evolution of $r_{20}$, $r_{50}$ and $r_{80}$ are explored for star-forming and quiescent galaxies. At fixed mass, the star-forming galaxies do not show significant changes in their $r_{20}$, $r_{50}$ and $r_{80}$ sizes, indicating self-similar growth. Only above the pivot stellar mass of $log(M_{ast}/M_{odot})simeq10.5$, $r_{80}$ evolves as $r_{80}propto(1+z)^{-0.85pm0.20}$, indicating that mass builds up in the outskirts of these systems (inside-out growth). The Sersic values also increase for the massive star-forming galaxies towards late cosmic time. Massive quiescent galaxies show stronger size evolution at all radii, in particular the $r_{20}$ sizes. For these massive galaxies, Sersic values remain almost constant since at least $zsim1.3$, indicating that the strong size evolution is related to the changes in the outer parts of these galaxies. We make all the structural parameters publicly available.
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