Tunable coherent light sources operating in the vacuum ultraviolet (VUV) region in 100-200-nm (6-12 eV) wavelength range have important spectroscopic applications in many research fields, including time-resolved angle-resolved photoemission spectroscopy (ARPES). Recent advances in laser technology have enabled the upconversion of visible femtosecond lasers to the vacuum and extreme ultraviolet regions. However, the complexity of their experimental setups and the scarcity of bulk nonlinear crystals for VUV generation have hampered its widespread use. Here, we propose the use of a free-standing dielectric nanomembranes as a simple and practical method for tunable VUV generation. We demonstrate that third harmonic VUV light is generated with sufficient intensity for spectroscopic applications from commercially available SiO2 nanomemebranes of submicron thicknesses under excitation with visible femtosecond laser pulses. The submicron thickness of the nanomembranes is optimal for maximize the VUV generation efficiency and prevents self-phase modulation and spectral broadening of the fundamental beam. The observed VUV photons are up to 10^7 photons per pulse at 157 nm with 1-kHz repetition rate, corresponding to a conversion efficiency of 10^-6. Moreover, the central VUV wavelength can be tuned in 146-190-nm wavelength range by changing the fundamental wavelength. We also explore material and thickness dependence with experiments and calculations. The presented results suggest that dielectric nanomembranes can be used as a practical nonlinear media for VUV spectroscopic applications.
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