The paper presents a derivation of analytical components of S-matrices for arbitrary planar diffractive structures and metasurfaces in the Fourier domain. Attained general formulas for S-matrix components can be applied within both formulations in the Cartesian and curvilinear metric. A numerical method based on these results can benefit from all previous improvements of the Fourier domain methods. In addition, we provide expressions for S-matrix calculation in case of periodically corrugated layers of 2D materials, which are valid for arbitrary corrugation depth-to-period ratios. As an example the derived equations are used to simulate resonant grating excitation of graphene plasmons and an impact of silica interlayer on corresponding reflection curves.
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