A high-Q, ultrathin-walled microbubble resonator for aerostatic pressure sensing


الملخص بالإنكليزية

Sensors based on whispering gallery resonators have minute footprints and can push achievable sensitivities and resolutions to their limits. Here, we use a microbubble resonator, with a wall thickness of 500 nm and an intrinsic Q-factor of $10^7$ in the telecommunications C-band, to investigate aerostatic pressure sensing via stress and strain of the material. The microbubble is made using two counter-propagating CO$_2$ laser beams focused onto a microcapillary. The measured sensitivity is 19 GHz/bar at 1.55 $mu$m. We show that this can be further improved to 38 GHz/bar when tested at the 780 nm wavelength range. In this case, the resolution for pressure sensing can reach 0.17 mbar with a Q-factor higher than $5times10^7$.

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