Deposition of clusters from the gas phase is becoming an enabling technology for the production of nanostructured devices. Supersonic clusters beam deposition (SCBD) has been shown as a viable route for the production of nanostructured thin films. By using SCBD and by exploiting aerodynamical effects typical of supersonic beams it is possible to obtain very high deposition rates with a control on neutral cluster mass distribution, allowing the deposition of thin films with tailored nanostructure. Due to high deposition rates, high lateral resolution, low temperature processing, SCBD can be used for the integration of cluster-assembled films on micro- and nanofabricated platforms with limited or no post-growth processing. Here we present the industrial opportunities for batch fabrication of gas sensor microarrays based on transition metal oxide nanoparticles deposited on microfabricated substrates.
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