Surface-enhanced Raman spectroscopy is a powerful and versatile sensing method with a detection limit down to the single molecule level. In this article, we demonstrate how topology optimization (TopOpt) can be used for designing surface enhanced Raman scattering (SERS) substrates adhering to realistic fabrication constraints. As an example, we experimentally demonstrated a SERS enhancement factor of 5*10e4 for the 604 cm-1 Raman line of rhodamine 6G using metal nanostructures with a critical dimension of 20 nm. We then show that, by relaxing the fabrication constraints, TopOpt may be used to design SERS substrates with orders of magnitude larger enhancement factor. The results validate topology optimization as an effective method for engineering nanostructures with optimal performance and fabrication tolerance.
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