We developed a coherent frequency-domain THz spectroscopic technique on a coplanar waveguide in the ultrabroad frequency range from 200 MHz to 1.6 THz based on continuous wave (CW) laser spectroscopy. Optical beating created by mixing two frequency-tunable CW lasers is focused on photoconductive switches to generate and detect high-frequency current in a THz circuit. In contrast to time-domain spectroscopy, our frequency-domain spectroscopy enables unprecedented frequency resolution of 10 MHz without using complex building blocks of femtosecond laser optics. Furthermore, due to the coherent nature of the photomixing technique, we are able to identify the origin of multiple reflections in the time domain using the Hilbert analysis and inverse Fourier transform. These results demonstrate that the advantages of on-chip coherent frequency-domain spectroscopy, such as its broadband, frequency resolution, usability, and time-domain accessibility, provide a unique capability for measuring ultrafast electron transport in integrated THz circuits.
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