Electron tomography (ET) has been demonstrated to be a powerful tool in addressing challenging problems, such as understanding 3D interactions among various microstructures. Advancing ET to broader applications requires novel instrumentation design to break the bottlenecks both in theory and in practice. In this work, we built a compact four-degree-of-freedom (three-directional positionings plus self-rotation) nano-manipulator dedicated to ET applications, which is called X-Nano transmission electron microscope (TEM) holder. All the movements of the four degrees of freedom are precisely driven by built-in piezoelectric actuators, minimizing the artefacts due to the vibration and drifting of the TEM stage. Full 360o rotation is realized with an accuracy of 0.05o in the whole range, which solves the missing wedge problem. Meanwhile, the specimen can move to the rotation axis with an integrated 3D nano-manipulator, greatly reducing the effort in tracking sample locations during tilting. Meanwhile, in-situ stimulation function can be seamlessly integrated into the X-Nano TEM holder so that dynamic information can be uncovered. We expect that more delicate researches, such as those about 3D microstructural evolution, can be carried out extensively by means of this holder in the near future.
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