Magnetic force microscopy (MFM) measurements generally provide phase images which represent the signature of domain structures on the surface of nanomaterials. To quantitatively determine magnetic stray fields based on an MFM image requires calibrated properties of the magnetic tip. In this work, an approach is presented for calibrating a magnetic tip using a Co/Pt multilayered film as a reference sample which shows stable well-known magnetic properties and well-defined perpendicular band domains. The approach is based on a regularized deconvolution process in Fourier domain with a Wiener filter and the L-curve method for determining a suitable regularization parameter to get a physically reasonable result. The calibrated tip is applied for a traceable quantitative determination of the stray fields of a test sample which has a patial frequency spectrum covered by that of the reference sample. According to the Guide to the expression of uncertainty in measurement, uncertainties of the processing algorithm are estimated considering the fact that the regularization influences significantly the quantitative analysis. We discuss relevant uncertainty components and their propagations between real domain and Fourier domain for both, the tip calibration procedure and the stray field calculation, and propose an uncertainty evaluation procedure for quantitative magnetic force microscopy.
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