We report here a quantitative method of Transmission Electron Microscopy (TEM) to measure the shapes, sizes and volumes of nanoparticles which are responsible for their properties. Gold nanoparticles (Au NPs) acting as nucleating agents for the electroless deposition of silver NPs on SU-8 polymers were analyzed in this project. The atomic-number contrast (Z-contrast) imaging technique reveals the height and effective diameter of each Au NP and a volume distribution is obtained. Varying the reducing agents produced Au NPs of different sizes which were found both on the polymer surface and in some cases buried several nanometers below the surface. The morphology of Au NPs is an important factor for systems that use surface-bound nanoparticles as nucleation sites as in electroless metallization. Electrolessly deposited silver layers reduced by hydroquinone on SU-8 polymer are analyzed in this project.
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