Aiming at high precision beam position measurement of micron or sub-micron for Shanghai Soft X-ray free electron laser (SXFEL) facility which is being built in site of the Shanghai Synchrotron Radiation Facility (SSRF), Shanghai Institute of Applied Physics has developed a high Q cavity beam position monitor (CBPM) that the resonant frequency is 4.7 GHz and relevant BPM electronics include dedicated RF front-end and home-made digital BPM (DBPM) also has been done. The cavity design, cold test, system architecture and the beam test with three adjacent pickups has been performed in Shanghai Deep ultraviolet free electron laser(SDUV-FEL) facility are included. The beam experiment results show that the physical design of our CBPM is consistent with the expectations basically and the beam position resolution can fulfill the resolution requirements for the SXFEL project if we optimize the beam conditions.
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