F-substituted ROBiS2 (R = La, Ce, Nd) superconducting single crystals with different F concentration were grown successfully using CsCl/KCl flux. All the obtained single crystals had a plate-like shape with a well-developed ab-plane of 1-2 mm in size. The flux components of Cs, K, and Cl were not detected in the obtained single crystals by electron probe microanalysis. The grown single crystals of F-substituted LaOBiS2 and CeOBiS2 showed superconducting at about 3 K while the Tc of the F-substituted NdOBiS2 exhibited approximately 5 K. The superconducting anisotropy of the single crystals of F-substituted LaOBiS2 and NdOBiS2 was estimated to be 30-45 according to the effective mass model whereas those values were 13-21 for the F-substituted CeOBiS2 single crystals. The F-substituted CeOBiS2 single crystals exhibited magnetic order at about 7 K that apparently coexisted with superconductivity below around 3 K.
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