Epitaxial Y3Fe5O12 thin films have been deposited by off-axis sputtering, which exhibit excellent crystalline quality, enabling observation of large spin pumping signals in Pt/Y3Fe5O12 and W/Y3Fe5O12 bilayers driven by cavity ferromagnetic resonance. The inverse spin Hall voltages reach 2.10 mV and -5.26 mV in 5-mm long Pt/Y3Fe5O12 and W/Y3Fe5O12 bilayers, respectively, excited by a radio-frequency magnetic field of 0.3 Oe. From the ferromagnetic resonance linewidth broadening, the interfacial spin mixing conductance of 4.56E14 {Omega}-1m-2 and 2.30E14 {Omega}-1m-2 are obtained for Pt/Y3Fe5O12 and W/Y3Fe5O12 bilayers, respectively.
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