Design of a multichannel 127 degree cylindrical spectrometer for sputtered ions


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Design details of a 127 degree electrostatic cylindrical spectrometer equipped with a position-sensitive micro-channel plate detector for measuring the sputtered ions in collisions of highly charged ions with solid surface is described. The nonlinear relationship between the point of fall versus the ionic energy, the blurring of the point of fall caused by the divergence of incident angle and the finite entrance aperture, the transform from a position spectrum to an energy spectrum, as well as the influence of the fringing fields are discussed.

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