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Diagnostics of the beam transverse profile with ever more demanding spatial resolution is required by the progress on novel particle accelerators - such as laser and plasma driven accelerators - and by the stringent beam specifications of the new generation of X-ray facilities. In a linac driven Free-Electron-Laser (FEL), the spatial resolution constraint joins with the further requirement for the diagnostics to be minimally invasive in order to protect radiation sensitive components - such as the undulators - and to preserve the lasing mechanism. As for high resolution measurements of the beam transverse profile in a FEL, wire-scanners (WS) are the top-ranked diagnostics. Nevertheless, conventional WS consisting of a metallic wire (beam-probe) stretched onto a frame (fork) can provide at best a rms spatial resolution at the micrometer scale along with an equivalent surface of impact on the electron beam. In order to improve the spatial resolution of a WS beyond the micrometer scale along with the transparency to the lasing, PSI and FERMI are independently pursuing the technique of the nano-lithography to fabricate a free-standing and sub-micrometer wide WS beam-probe fully integrated into a fork. Free-standing WS with a geometrical resolution of about 250 nm have been successfully tested at SwissFEL where low charge electron beams with a vertical size of 400-500 nm have been characterized. Further experimental tests carried out at SwissFEL at the nominal beam charge of 200 pC confirmed the resilience to the heat-loading of the nano-fabricated WS. In this work, details on the nano-fabrication of free-standing WS as well as results of the electron-beam characterization are presented.
The wire scanners are used for a measurement of the very small beam size and the emittance in Accelerator Test Facility (ATF). They are installed in the extraction beam line of ATF damping ring. The extracted beam emittance are ex=1.3x10-9 m.rad, ey=
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