اشترك بالحزمة الذهبية واحصل على وصول غير محدود شمرا أكاديميا
تسجيل مستخدم جديدModeling and simulation of ion energy distribution functions in technological plasmas
104
0
0.0
(
0
)
تأليف
Thomas Mussenbrock
اسأل ChatGPT حول البحث
ﻻ يوجد ملخص باللغة العربية
The highly advanced treatment of surfaces as etching and deposition is mainly enabled by the extraordinary properties of technological plasmas. The primary factors that influence these processes are the flux and the energy of various species, particularly ions, that impinge the substrate surface. These features can be theoretically described using the ion energy distribution function (IEDF). The article is intended to summarize the fundamental concepts of modeling and simulation of IEDFs from simplified models to self-consistent plasma simulations. Finally, concepts for controlling the IEDF are discussed.
قيم البحث
اقرأ أيضاً
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The technique is based on the tailoring of the driving voltage waveform,
i.e. adjusting the phases and amplitudes of the applied harmonics, to optimize the accumulation of ions created by charge exchange collisions and their subsequent acceleration by the sheath electric field. The position of the peak (i.e. the ion energy) and the flux of the ions within the peak of the IDF can be controlled in a wide domain by tuning the parameters of the applied RF voltage waveform, allowing optimization of various applications where surface reactions are induced at particular ion energies.
The effect of a magnetic field on the characteristics of capacitively coupled radio frequency discharges is investigated and found to be substantial. A one-dimensional particle-in-cell simulation shows that geometrically symmetric discharges can be a
symmetrized by applying a spatially inhomogeneous magnetic field. This effect is similar to the recently discovered electrical asymmetry effect. Both effects act independently, they can work in the same direction or compensate each other. Also the ion energy distribution functions at the electrodes are strongly affected by the magnetic field, although only indirectly. The field influences not the dynamics of the sheath itself but rather its operating conditions, i.e., the ion flux through it and voltage drop across it. To support this interpretation, the particle-in-cell results are compared with the outcome of the recently proposed ensemble-in-spacetime algorithm. Although that scheme resolves only the sheath and neglects magnetization, it is able to reproduce the ion energy distribution functions with very good accuracy, regardless of whether the discharge is magnetized or not.
This article illustrates how very small deviations from the Maxwellian exponential tail, while leaving unchanged bulk quantities, can yield dramatic effects on fusion reaction rates and discuss several mechanisms that can cause such deviations.
A numerical tool for analysing spatially anisotropic electron populations in electron cyclotron resonance (ECR) plasmas has been developed, using a trial-and-error electron energy distribution function (EEDF) fitting method. The method has been teste
d on space-resolved warm electrons in the energy range $2-20,mathrm{keV}$, obtained from self-consistent simulations modelling only electron dynamics in ECR devices, but lacked real-world validation. For experimentally benchmarking the method, we attempted to numerically reproduce the experimental X-ray emission spectrum measured from an argon plasma. Results of this analysis have provided crucial information about density and temperature of warm electrons, and competing distributions of warm and hot electron components. This information can be fed back to simulation models to generate more realistic data. Subsequent application of the numerical tool as described to the improved simulation data can result in continuous EEDFs that reflect the nature of charge distributions in anisotropic ECR plasmas. These functions can be also applied to electron dependent reactions, in order to reproduce experimental results, like those concerning space-dependent K$alpha$ emissions.
Solid-density plasmas driven by intense x-ray free-electron laser (XFEL) radiation are seeded by sources of non-thermal photoelectrons and Auger electrons that ionize and heat the target via collisions. Simulation codes that are commonly used to mode
l such plasmas, such as collisional-radiative (CR) codes, typically assume a Maxwellian distribution and thus instantaneous thermalization of the source electrons. In this study, we present a detailed description and initial applications of a collisional particle-in-cell code, PICLS, that has been extended with a self-consistent radiation transport model and Monte-Carlo models for photoionization and KLL Auger ionization, enabling the fully kinetic simulation of XFEL-driven plasmas. The code is used to simulate two experiments previously performed at the Linac Coherent Light Source investigating XFEL-driven solid-density Al plasmas. It is shown that PICLS-simulated pulse transmissions using the Ecker-Kroll continuum-lowering model agree much better with measurements than do simulations using the Stewart-Pyatt model. Good quantitative agreement is also found between the time-dependent PICLS results and those of analogous simulations by the CR code SCFLY, which was used in the analysis of the experiments to accurately reproduce the observed K{alpha} emissions and pulse transmissions. Finally, it is shown that the effects of the non-thermal electrons are negligible for the conditions of the particular experiments under investigation.
سجل دخول لتتمكن من نشر تعليقات
التعليقات
جاري جلب التعليقات
سجل دخول لتتمكن من متابعة معايير البحث التي قمت باختيارها
