We are developing position sensitive silicon detectors (PSDs) which have an electrode at each of four corners so that incident position of a charged particle can be obtained with signal from the electrodes. It is expected that the position resolution of the electromagnetic calorimeter (ECAL) of the ILD detector will be improved by introducing PSDs to detection layers. We have been developing the PSDs for several years. In the previous production we found that the charge separation is not optimally done due to the readout impedance. To solve the issue, we produced new PSDs with higher surface resistance with an additional resistive layer on the surface. We also implemented several techniques to decrease position distortion and increase signal-to-noise ratio which are essential for the optimal position resolution. The measurements on the prototype sensors are ongoing, including radiation source measurement and laser measurement using an ASIC for silicon pad detectors.
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