Parylenes are barrier materials employed as protective layers. However, many parylenes are unsuitable for applications under harsh conditions. A new material, parylene F, demonstrates considerable potential for a wide range of applications due to its high temperature and UV resistance. For the first time, the wettability and surface energy of parylene F were investigated to determine the feasibility of parylene F as an alternative to the commonly employed parylene C. The results show that parylene F has a hydrophobic surface with a water contact angle of 109.63 degrees. We found that 3.5 ul probe liquid is an optimal value for the contact angle measurement of parylene F. Moreover, we found that the Owens-Wendt-Kaelble and the Lifshitz-van der Waals/acid-base approaches are unsuitable for determining the surface energy of parylene F, whereas an approach based on the limitless liquid-solid interface wetting system is compatible. Furthermore, the results show that parylene F has a surface energy of 39.05 mJ/m2. Considering the improved resistance, relatively low cost, and the desirable properties, parylene F can replace parylene C for applications under harsh conditions.
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