Since the new millennium coherent extreme ultra-violet and soft x-ray radiation has revolutionized the understanding of dynamical physical, chemical and biological systems at the electrons natural timescale. Unfortunately, coherent laser-based upconversion of infrared photons to vacuum-ultraviolet and soft x-ray high-order harmonics in gaseous, liquid and solid targets is notoriously inefficient. In dense nonlinear media, the limiting factor is strong re-absorption of the generated high-energy photons. Here we overcome this limitation by allowing high-order harmonics generated from a periodic array of thin one-dimensional crystalline silicon ridge waveguides to propagate in the vacuum gaps between the ridges, thereby avoiding the high absorption loss of the bulk nonlinear material and resulting in a ~ 100-fold increase in propagation length. As the grating period is varied, each high-harmonic shows a different and marked modulation, indicating the onset of coherent addition which is otherwise suppressed in absorption-limited emission. By beating the absorption limit, our results pave the way for bright coherent short-wavelength sources and their implementation in nano-photonic devices.
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