The Fe-doped CuO thin films were deposited onto glass substrates by Spray pyrolysis technique. The structural, micro-structural, optical and electrical properties of the synthesized samples were investigated in details. The X-Ray diffraction (XRD), Raman and Fourier Transform Infrared (FTIR) spectroscopy, confirmed that the studied samples exhibit single phase monoclinic structure of CuO. The UV-VIS spectrophotometer mentioned that the transmittance increases to 80 % when increasing the Fe concentration. Furthermore, the band gap energy of the obtained CuO was 1.29 eV. This value was slightly increased by the Fe substitution. In addition, the electrical properties of the films such as the conductivity, the mobility, the resistivity and the carrier concentration have been studied. The Hall Effect measurements confirmed the p-type conductivity of the studied films.
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