For quantitative electron microscopy high precision position information is necessary so that besides an adequate resolution and sufficiently strong contrast of atoms, small width of peaks which represent atoms in structural images is needed. Size of peak is determined by point spread (PS) of instruments as well as that of atoms when point resolution reach the subangstrom scale and thus PS of instruments is comparable with that of atoms. In this article, relationship between PS with atomic numbers, sample thickness, and spherical aberration coefficients will be studied in both negative Cs imaging (NCSI) and positive Cs imaging (PCSI) modes by means of dynamical image simulation. Through comparing the peak width with different thickness and different values of spherical aberration, NCSI mode is found to be superior to PCSI considering smaller peak width in the structural image.
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