Resonance Raman (RR) peaks of and stretching modes and their higher harmonics have been observed superimposed on photoluminescence (PL) spectrum of thin films. Commercial fluorine doped thin films deposited by sputtering on glass and thin films deposited on Si by laser ablation have been studied. The dispersions of CO and OH stretching RR modes are ~ 600 cm-1/eV and 800 cm-1 respectively. The dispersion of the third harmonic of CO stretching mode is ~ 2000 cm-1/eV. Similar dispersion of RR peak of stretching modes and higher harmonics superimposed on PL spectra has been observed in Mo1-xFexO2 thin films and SiO2 bulk glass. Large dispersion of RR peaks seems to be a common property of oxides with impurities of and .
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