The radiating process of a crystalline sample cause damages in this sample .These damages composed mostly of displaced sample atoms from their regular position in lattice, and placed in irregular position, and of very less quantity from some beam particles ( strange particles ) , that placed inside of this sample. The depth and amount of these damages are correlating with radiating parameters. It's possible to estimate the depth distribution profiles of damages by RBS-Method, but the sensitivity of this method is not enough to determine the depth distribution of concentration of beam particles , that placed inside of the sample . The placement depth of RBS-Profiles top is strongly correlated with orientation angle of a sample's channel relative to radiating beam also to kind of channel ,whereas the RBS-Profiles top displaces in depth , in channel radiation compare with its counter part in random radiation and the displacement value correlates with radiation parameters The height of RBS-Profiles top increase by increasing of radiation dose, and height that can't be survived called amorph state , and the agreeing dose called ,amorph dose , the amorph dose correlates also with radiation parameters, special sample temperature.