The thin films of TiO2 were prepared by the Sol-Gel, on glass subtracts by using the following initial solutions: trichlorethylene titanium, ethanol, sodium hydroxide and hydrochloric acid and distilled water. The films were annealed at temperatures(200- 300- 400-500)c° for 1 hour. The structure of the prepared and annealed films were studied by XRD. The XRD rusltes showed that the films prepared crystallize according to orthorhombic Structure.Lattice constants were calculated and it was found that it was consistent with the data JPCDS and with some scientific works.