We propose a way to make arrays of optical frequency dipole-force microtraps for cold atoms above a dielectric substrate. Traps are nodes in the evanescent wave fields above an optical waveguide resulting from interference of different waveguide modes. The traps have features sought in developing neutral atom based architectures for quantum computing: ~ 1 mW of laser power yields very tight traps 150 nm above a waveguide with trap vibrational frequencies ~ 1 MHz and vibrational ground state sizes ~ 10 nm. The arrays are scalable and allow addressing of individual sites for quantum logic operations.
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