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Performance and uniformity of a kilo-pixel array of Ti/Au transition-edge sensor microcalorimeters

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 Added by Emanuele Taralli
 Publication date 2021
  fields Physics
and research's language is English




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Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of X-ray space observatories. These arrays are required to achieve an energy resolution $Delta E$ < 3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. We are currently developing X-ray microcalorimeter arrays for use in future laboratory and space-based X-ray astrophysics experiments and ground-based spectrometers. In this contribution we report on the development and the characterization of a uniform 32$times$32 pixel array with 140$times$30 $mu$m$^2$ Ti/Au TESs with Au X-ray absorber. We report upon extensive measurements on 60 pixels in order to show the uniformity of our large TES array. The averaged critical temperature is $T_mathrm{c}$ = 89.5$pm$0.5 mK and the variation across the array ($sim$1 cm) is less than 1.5 mK. We found a large region of detectors bias points between 20% and 40% of the normal-state resistance where the energy resolution is constantly lower than 3 eV. In particular, results show a summed X-ray spectral resolution $Delta E_mathrm{FWHM}$ = 2.50$pm$0.04 eV at a photon energy of 5.9 keV, measured in a single-pixel mode using a frequency domain multiplexing (FDM) readout system developed at SRON/VTT at bias frequencies ranging from 1 to 5 MHz. Moreover we compare the logarithmic resistance sensitivity with respect to temperature and current ($alpha$ and $beta$ respectively) and their correlation with the detectors noise parameter $M$, showing an homogeneous behaviour for all the measured pixels in the array.



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We are developing a kilo-pixels Ti/Au TES array as a backup option for Athena X-IFU. Here we report on single-pixel performance of a 32$times$32 array operated in a Frequency Division Multiplexing (FDM) readout system, with bias frequencies in the range 1-5 MHz. We have tested the pixels response at several photon energies, by means of a $^{55}$Fe radioactive source (emitting Mn-K$alpha$ at 5.9 keV) and a Modulated X-ray Source (MXS, providing Cr-K$alpha$ at 5.4 keV and Cu-K$alpha$ at 8.0 keV). First, we report the procedure used to perform the detector energy scale calibration, usually achieving a calibration accuracy better than $sim$ 0.5 eV in the 5.4 - 8.9 keV energy range. Then, we present the measured energy resolution at the different energies (best single pixel performance: $Delta$E$_{FWHM}$ = 2.40 $pm$ 0.09 eV @ 5.4 keV; 2.53 $pm$ 0.10 eV @ 5.9 keV; 2.78 $pm$ 0.16 eV @ 8.0 keV), investigating also the performance dependency from the pixel bias frequency and the count rate. Thanks to long background measurements ($sim$ 1 day), we finally detected also the Al-K$alpha$ line at 1.5 keV, generated by fluorescence inside the experimental setup. We analyzed this line to obtain a first assessment of the single-pixel performance also at low energy ($Delta$E$_{FWHM}$ = 1.91 eV $pm$ 0.21 eV @ 1.5 keV), and to evaluate the linearity of the detector response in a large energy band (1.5 - 8.9 keV).
SPT-3G is a polarization-sensitive receiver, installed on the South Pole Telescope, that measures the anisotropy of the cosmic microwave background (CMB) from degree to arcminute scales. The receiver consists of ten 150~mm-diameter detector wafers, containing a total of 16,000 transition-edge sensor (TES) bolometers observing at 95, 150, and 220 GHz. During the 2018-2019 austral summer, one of these detector wafers was replaced by a new wafer fabricated with Al-Mn TESs instead of the Ti/Au design originally deployed for SPT-3G. We present the results of in-lab characterization and on-sky performance of this Al-Mn wafer, including electrical and thermal properties, optical efficiency measurements, and noise-equivalent temperature. In addition, we discuss and account for several calibration-related systematic errors that affect measurements made using frequency-domain multiplexing readout electronics.
Large format arrays of transition edge sensor (TES) are crucial for the next generation of X-ray space observatories. Such arrays are required to achieve an energy resolution of $mathrm{Delta}E<$3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. We are currently developing X-ray microcalorimeter arrays as a backup option for the X-IFU instrument on board of ATHENA space telescope, led by ESA and foreseen to be launched in 2031. In this contribution, we report on the development and the characterization of a uniform 32$times$32 pixel array with (length$times $width) 140$times$30 $mu$m$^2$ TiAu TESs, which have textcolor{black}{a 2.3 $mu$m} thick Au absorber for X-ray photons. The pixels have a typical normal resistance $R_mathrm{n}$ = 121 m$Omega$ and a critical temperature $T_mathrm{c}sim$ 90 mK. We performed extensive measurements on 60 pixels out of the array in order to show the uniformity of the array. We obtained an energy resolutions between 2.4 and 2.6 eV (FWHM) at 5.9 keV, measured in a single-pixel mode at AC bias frequencies ranging from 1 to 5 MHz, with a frequency domain multiplexing (FDM) readout system, which is developed at SRON/VTT. We also present the detector energy resolution at X-ray with different photon energies generated by a modulated external X-ray source from 1.45 keV up to 8.9 keV. Multiplexing readout across several pixels has also been performed to evaluate the impact of the thermal crosstalk to the instruments energy resolution budget requirement. This value results in a derived requirement, for the first neighbour, that is less than 1$times$10$^{-3}$ when considering the ratio between the amplitude of the crosstalk signal to an X-ray pulse (for example at 5.9 keV)
78 - S. Shu , M. Calvo , J. Goupy 2021
One of the advantages of kinetic inductance detectors is their intrinsic frequency domain multiplexing capability. However, fabrication imperfections usually give rise to resonance frequency deviations, which create frequency collision and limit the array yield. Here we study the resonance frequency deviation of a 4-inch kilo-pixel lumped-element kinetic inductance detector (LEKID) array using optical mapping. Using the measured resonator dimensions and film thickness, the fractional deviation can be explained within $pm 25times 10^{-3}$, whereas the residual deviation is due to variation of electric film properties. Using the capacitor trimming technique, the fractional deviation is decreased by a factor of 14. The yield of the trimming process is found to be 97%. The mapping yield, measured under a 110~K background, is improved from 69% to 76%, which can be further improved to 81% after updating our readout system. With the improvement in yield, the capacitor trimming technique may benefit future large-format LEKID arrays.
The stability of Al-Mn transition edge sensor (TES) bolometers is studied as we vary the engineered TES transition, heat capacity, and/or coupling between the heat capacity and TES. We present thermal structure measurements of each of the 39 designs tested. The data is accurately fit by a two-body bolometer model, which allows us to extract the basic TES parameters that affect device stability. We conclude that parameters affecting device stability can be engineered for optimal device operation, and present the model parameters extracted for the different TES designs.
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