Particle lofting from substrate exposed to plasma and electron beam


Abstract in English

A nanometer-sized dielectric particle lying on a dielectric substrate is exposed to the flux of low-energy electrons, ion and electron fluxes from a cold plasma and the fluxes from the combination of these two sources with the help of particle-in-cell simulation to investigate the particle lofting phenomenon. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration, and the explanation of the dust levitation.

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