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Particle lofting from substrate exposed to plasma and electron beam

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 Added by P. V. Krainov
 Publication date 2020
  fields Physics
and research's language is English
 Authors P. V. Krainov




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A nanometer-sized dielectric particle lying on a dielectric substrate is exposed to the flux of low-energy electrons, ion and electron fluxes from a cold plasma and the fluxes from the combination of these two sources with the help of particle-in-cell simulation to investigate the particle lofting phenomenon. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration, and the explanation of the dust levitation.



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252 - P. V. Krainov 2020
The particle-in-cell simulation is applied to study a nanometer-sized dielectric particle lofting from a dielectric substrate exposed to a low energy electron beam. The article discusses the electron accumulation between such a substrate and a particle lying on it, that can cause a particle lofting. The results are of interest for dust mitigation in the semiconductor industry, the lunar exploration and the explanation of the dust levitation.
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