Pulsed laser deposition from a Nd:YAG laser was employed in production of hundreds of nanometer thick quasicrystalline Ti-Zr-Ni films on glass substrate. The influence of deposition temperature Ts on the structure, morphology and microstructure of the films across their thickness was investigated. The morphology and microstructure features were evaluated by X-ray diffraction and transmission electron microscopy techniques. The low deposition temperatures were found to produce films with nanometer sized grains embedded in an amorphous matrix. The grains exhibit quasicrystalline order. The higher deposition temperatures lead to films whose structure is not uniform all along the growth direction. The layer in contact with the substrate is a very thin amorphous layer. The main part of the film consists of crystallized columns. The columns have grown from a nano-crystallized layer where the size of crystallites increases with increasing thickness.
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