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Impulse control of chaos in the flexible shaft rotating-lifting system of the mono-silicon crystal puller

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 Added by Hai-Peng Ren
 Publication date 2020
  fields Physics
and research's language is English




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Chaos is shown to occur in the flexible shaft rotating-lifting (FSRL) system of the mono-silicon crystal puller. Chaos is, however, harmful for the quality of mono-silicon crystal production. Therefore, it should be suppressed. Many chaos control methods have been proposed theoretically and some have even been used in applications. For a practical plant displaying harmful chaos, engineers from a specified area usually face with the challenge to identifying chaos and to suppressing it by using a proper method. However, despite of the existing methods, chaos control method selection in the FSRL system is not a trivial task. For example, for the OGY method, if one cannot find a practical adjustable parameter, then the OGY method cannot be applied. An impulsive control method is being proposed which is efficiently able to suppress chaos in the FSRL system. The selection of the control parameters is obtained by using the Melnikov method. Simulation results show the correctness of our theoretical analysis and the effectiveness of the proposed chaos control method.



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56 - Hai-Peng Ren , Zi-Xuan Zhou , 2019
Silicon crystal puller (SCP) is a key equipment in silicon wafer manufacture, which is, in turn, the base material for the most currently used integrated circuit (IC) chips. With the development of the techniques, the demand for longer mono-silicon crystal rod with larger diameter is continuously increasing in order to reduce the manufacture time and the price of the wafer. This demand calls for larger SCP with increasing height, however, it causes serious swing phenomenon of the crystal seed. The strong swing of the seed causes difficulty in the solidification and increases the risk of mono-silicon growth failure.The main aim of this paper is to analyze the nonlinear dynamics in the FSRL system of the SCP. A mathematical model for the swing motion of the FSRL system is derived. The influence of relevant parameters, such as system damping, excitation amplitude and rotation speed, on the stability and the responses of the system are analyzed. The stability of the equilibrium, bifurcation and chaotic motion are demonstrated, which are often observed in practical situations. Melnikov method is used to derive the possible parameter region that leads to chaotic motion. Three routes to chaos are identified in the FSRL system, including period doubling, symmetry-breaking bifurcation and interior crisis. The work in this paper explains the complex dynamics in the FSRL system of the SCP, which will be helpful for the SCP designers in order to avoid the swing phenomenon in the SCP.
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