The sheath formation in a weakly magnetized collisionless electronegative plasma consisting of electrons, negative and positive ions has been numerically investigated using the hydrodynamic equations. The electrons and negative ions are assumed to follow Boltzmann relation. A sheath formation criterion has been analytically derived. The paper focuses on studying the sheath structure by varying the electronegativity. It has been observed that the presence of negative ions has a substantial effect on the sheath structure. The observations made in the present work have profound significance on processing plasmas, especially in the semiconductor industry as well as in fusion studies.
Download