Dielectric laser acceleration is a versatile scheme to accelerate and control electrons with the help of femtosecond laser pulses in nanophotonic structures. We demonstrate here the generation of a train of electron pulses with individual pulse durations as short as $270pm80$ attoseconds(FWHM), measured in an indirect fashion, based on two subsequent dielectric laser interaction regions connected by a free-space electron drift section, all on a single photonic chip. In the first interaction region (the modulator), an energy modulation is imprinted on the electron pulse. During free propagation, this energy modulation evolves into a charge density modulation, which we probe in the second interaction region (the analyzer). These results will lead to new ways of probing ultrafast dynamics in matter and are essential for future laser-based particle accelerators on a photonic chip.
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