High-efficient and high-purity photon sources are highly desired for quantum information processing. We report the design of a chip-scale hybrid SixNy and thin film periodically-poled lithium niobate waveguide for generating high-purity type-II spontaneous parametric down conversion (SPDC) photons in telecommunication band. The modeled second harmonic generation efficiency of 225% W^(-1)*cm^(-2) is obtained at 1560nm. Joint spectral analysis is performed to estimate the frequency correlation of SPDC photons, yielding intrinsic purity with up to 95.17%. The generation rate of these high-purity photon pairs is estimated to be 2.87 * 10^7 pairs/s/mW within the bandwidth of SPDC. Our chip-scale hybrid waveguide design has the potential for large scale on-chip quantum information processing and integrated photon-efficient quantum key distribution through high-dimensional time-energy encoding.
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