The superconducting properties of high-tc materials are functions of carriers concentration, which is controlled by the concentration of defects including heterovalent cations, interstitial oxygen ions, and oxygen vacancies. Here we combine low-temperature thermal treatment of La$_{2-x}$Sr$_{x}$CuO$_{4}$ epitaxial thin films and confocal Raman spectroscopy to control and investigate oxygen vacancies. We demonstrate that the apical site is the most favorable position to accommodate oxygen vacancies under low-temperature annealing conditions. Additionally we show that in high-quality films of overdoped La$_{2-x}$Sr$_{x}$CuO$_{4}$, oxygen vacancies strongly deform the oxygen environment around the copper ions. This observation is consistent with previous defect-chemical studies, and calls for further investigation of the defect induced properties in the overdoped regime of the hole-doped lanthanum cuprates.
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