In order to get homogeneous nanostructured Aluminum Nitride deposits, thin films were grown at room temperature on [001] Si substrates by radio frequency magnetron reactive sputtering. The deposits were analysed by Transmission Electron Microscopy, energy dispersive X-ray spectroscopy and Auger electron spectroscopy. Their microstructure and chemical composition were studied versus the plasma working pressure and the radio frequency power. Systematic analysis of cross views of the films allowed the authors to draw a microstructure/process parameters map. Four microstructural types were distinguished according to the decrease of the deposition rate. One is the well-known columnar microstructure. The second one is made of interrupted columns or fibrous grains. The third one is made of nano-sized particles (size of the particles ranges from 1.7 to 8 nm). The fourth and last microstructure is amorphous. The deposit morphology-process parameters correlation is commented on.
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