Parallel implementation of high-fidelity multi-qubit gates with neutral atoms

We report the implementation of universal two- and three-qubit entangling gates on neutral atom qubits encoded in long-lived hyperfine ground states. The gates are mediated by excitation to strongly interacting Rydberg states, and are implemented in parallel on several clusters of atoms in a one-dimensional array of optical tweezers. Specifically, we realize the controlled-phase gate, enacted by a novel, fast protocol involving only global coupling of two qubits to Rydberg states. We benchmark this operation by preparing Bell states with fidelity $mathcal{F} ge 95.0(2)%$, and extract gate fidelity $ge 97.4(3)%,$ averaged across five atom pairs. In addition, we report a proof-of-principle implementation of the three-qubit Toffoli gate, in which two control atoms simultaneously constrain the behavior of one target atom. These experiments demonstrate key ingredients for high-fidelity quantum information processing in a scalable neutral atom platform.