In this letter, the transient behavior of a ferroelectric (FE) metal-oxide-semiconductor (MOS) capacitor is theoretically investigated with a series resistor. It is shown that compared to a conventional high-k dielectric MOS capacitor, a significant inversion charge-boost can be achieved by a FE MOS capacitor due to a steep transient subthreshold swing (SS) driven by the free charge-polarization mismatch. It is also shown that the observation of steep transient SS significantly depends on the viscosity coefficient under Landaus mean field theory, in general representing the average FE time response associated with domain nucleation and propagation. Therefore, this letter not only establishes a theoretical framework that describes the physical origin behind the inversion charge-boost in a FE MOS capacitor, but also shows that the key feature of depolarization effect on a FE MOS capacitor should be the inversion-charge boost, rather than the steep SS (e.g., sub-60mV/dec at room temperature), which cannot be experimentally observed as the measurement time is much longer than the FE response. Finally, we outlines the required material targets for the FE response in field-effect transistors to be applicable for next-generation high-speed and low-power digital switches.
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