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Register a new userLattice strain and tilt mapping in stressed Ge microstructures using X-ray Laue micro-diffraction and rainbow-filtering
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Micro-Laue diffraction and simultaneous rainbow-filtered micro-diffraction were used to measure accurately the full strain tensor and the lattice orientation distribution at the sub-micron scale in highly strained, suspended Ge micro-devices. A numerical approach to obtain the full strain tensor from the deviatoric strain measurement alone is also demonstrated and used for faster full strain mapping. We performed the measurements in a series of micro-devices under either uniaxial or biaxial stress and found an excellent agreement with numerical simulations. This shows the superior potential of Laue micro-diffraction for the investigation of highly strained micro-devices.
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White beam x-ray Laue microdiffraction allows fast mapping of crystal orientation and strain fields in polycrystals, with a submicron spatial resolution in two dimensions. In the well crystallized parts of the grains, the analysis of Laue spot positions provides the local deviatoric strain tensor. The hydrostatic part of the strain tensor may also be obtained, at the cost of a longer measuring time, by measuring the energy profiles of the Laue spots using a variable-energy monochromatic beam. A new Rainbow method is presented, which allows measuring the energy profiles of the Laue spots while remaining in the white-beam mode. It offers mostly the same information as the latter monochromatic method, but with two advantages : i) the simultaneous measurement of the energy profiles and the Laue pattern; ii) the rapid access to energy profiles of a larger number of spots, for equivalent scans on the angle of the optical element. The method proceeds in the opposite way compared to a monochromator-based method, by simultaneously removing several sharp energy bands from the incident beam, instead of selecting a single one. It uses a diamond single crystal placed upstream of the sample. Each Laue diffraction by diamond lattice planes attenuates the corresponding energy in the incident spectrum. By rotating the crystal, the filtered-out energies can be varied in a controlled manner, allowing one to determine the extinction energies of several Laue spots of the studied sample. The energies filtered-out by the diamond crystal are obtained by measuring its Laue pattern with an other 2D detector, at each rotation step. This article demonstrates the feasibility of the method, and its validation through the measurement of a known lattice parameter.
We depict the use of x-ray diffraction as a tool to directly probe the strain status in rolled-up semiconductor tubes. By employing continuum elasticity theory and a simple model we are able to simulate quantitatively the strain relaxation in perfect crystalline III-V semiconductor bi- and multilayers as well as in rolled-up layers with dislocations. The reduction in the local elastic energy is evaluated for each case. Limitations of the technique and theoretical model are discussed in detail.
Tungsten is the main candidate material for plasma-facing armour components in future fusion reactors. Bombardment with energetic fusion neutrons causes collision cascade damage and defect formation. Interaction of defects with helium, produced by transmutation and injected from the plasma, modifies defect retention and behaviour. Here we investigate the residual lattice strains caused by different doses of helium-ion-implantation into tungsten and tungsten-rhenium alloys. Energy and depth-resolved synchrotron X-ray micro-diffraction uniquely permits the measurement of lattice strain with sub-micron 3D spatial resolution and ~10-4 strain sensitivity. Increase of helium dose from 300 appm to 3000 appm increases volumetric strain by only ~2.4 times, indicating that defect retention per injected helium atom is ~3 times higher at low helium doses. This suggests that defect retention is not a simple function of implanted helium dose, but strongly depends on material composition and presence of impurities. Conversely, analysis of W-1wt% Re alloy samples and of different crystal orientations shows that both the presence of rhenium, and crystal orientation, have comparatively small effect on defect retention. These insights are key for the design of armour components in future reactors where it will be essential to account for irradiation-induced dimensional change when predicting component lifetime and performance.
Coherent x-ray micro-diffraction and local mechanical loading can be combined to investigate the mechanical deformation in crystalline nanostructures. Here we present measurements of plastic deformation in a copper crystal of sub-micron size obtained by loading the sample with an Atomic Force Microscopy tip. The appearance of sharp features in the diffraction pattern, while conserving its global shape, is attributed to crystal defects induced by the tip.
Using X-ray micro-diffraction and surface acoustic wave spectroscopy, we measure lattice swelling and elastic modulus changes in a W-1%Re alloy after implantation with 3110 appm of helium. A fraction of a percent observed lattice expansion gives rise to an order of magnitude larger reduction in the surface acoustic wave velocity. A multiscale elasticity, molecular dynamics, and density functional theory model is applied to the interpretation of observations. The measured lattice swelling is consistent with the relaxation volume of self-interstitial and helium-filled vacancy defects that dominate the helium-implanted material microstructure. Molecular dynamics simulations confirm the elasticity model for swelling. Elastic properties of the implanted surface layer also change due to defects. The reduction of surface acoustic wave velocity predicted by density functional theory calculations agrees remarkably well with experimental observations.
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