A low-energy electron diffraction (LEED) apparatus which works at temperatures down to about 100 mK is designed to obtain structural information of 2D helium on graphite. This very low temperature system can be realized by reducing the thermal inflow from the LEED optics to the sample which is cooled by cryogen-free dilution refrigerator. The atomic scattering factor of He is also estimated using a kinematical model, which suggests that the diffraction signal from He atom can well be obtained by using a delay-line detector instead of a fluorescent screen.
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