Multiferroic BiFeO3 (BFO) thin film exhibiting desired ferroelectric and enhanced magnetic properties was grown on La0.67Sr0.33MnO3 (LSMO) buffered Pt/TiO2/SiO2/Si substrates by off-axis RF magnetic sputtering, where a highly (111)-oriented texture was obtained. The BFO/LSMO thin film exhibits excellent ferroelectric and dielectric behaviors (2Pr ~210.7 {mu}C/cm2, 2Ec~435 kV/cm, {epsilon}r ~116.8, and tan{delta} ~ 2.7% at 1 kHz), together with a long fatigue endurance up to 1010 switching cycles at amplitude of 300 kV/cm. An enhancement in magnetic behavior was also observed with Ms=89.5 emu/cm3, which is largely contributed from the magnetic layer of LSMO. The coexistence of ferroelectric and ferromagnetic properties in the double layered BFO/LSMO thin film makes it a promising candidate system for applications where the magnetoelectric behavior is required.
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