We present and discuss the fabrication process and the performance of a flexible micro thermoelectric generator with electroplated Bi2Te3 thermocouples in a SU-8 mold. Demonstrator devices generate 278uWcm-2 at dTmeas=40K across the experimental set up. Based on model calculations, a temperature difference of dTG=21.4K across the generator is assumed. Due to the flexible design and the chosen generator materials, the performance stays high even for curved contact surfaces. The measurement results correlate well with the model based design optimization predictions.
This paper reports on our research in developing a micro power generation system based on gas turbine engine and piezoelectric converter. The micro gas turbine engine consists of a micro combustor, a turbine and a centrifugal compressor. Comprehensive simulation has been implemented to optimal the component design. We have successfully demonstrated a silicon-based micro combustor, which consists of seven layers of silicon structures. A hairpin-shaped design is applied to the fuel/air recirculation channel. The micro combustor can sustain a stable combustion with an exit temperature as high as 1600 K. We have also successfully developed a micro turbine device, which is equipped with enhanced micro air-bearings and driven by compressed air. A rotation speed of 15,000 rpm has been demonstrated during lab test. In this paper, we will introduce our research results major in the development of micro combustor and micro turbine test device.
Multilayered ceramic substrates with embedded micro patterns are becoming increasingly important, for example, in harsh environment electronics and microfluidic devices. Fabrication of these embedded micro patterns, such as micro channels, cavities and vias, is a challenge. This study focuses on the process of patterning micro features on ceramic green substrates using micro embossing. A ceramic green tape that possessed near-zero shrinkage in the x-y plane was used, six layers of which were laminated as the embossing substrate. The process parameters that impact on the pattern fidelity were investigated and optimized in this study. Micro features with line-width as small as several micrometers were formed on the ceramic green substrates. The dynamic thermo-mechanical analysis indicated that extending the holding time at certain temperature range would harden the green substrates with little effect on improving the embossing fidelity. Ceramic substrates with embossed micro patterns were obtain d after co-firing. The embedded micro channels were also obtained by laminating the green tapes on the embossed substrates.
We report a novel synthesis for near monodisperse, sub-10-nm Bi2Te3 nanoparticles. At first, a new reduction route to bismuth nanoparticles is described which are applied as starting materials in the formation of rhombohedral Bi2Te3 nanoparticles. After ligand removal by a novel hydrazine hydrate etching procedure, the nanoparticle powder is spark plasma sintered to a pellet with preserved crystal grain sizes. Unlike previous works on the properties of Bi2Te3 nanoparticles, the full thermoelectric characterization of such sintered pellets shows a highly reduced thermal conductivity and the same electric conductivity as bulk n-type Bi2Te3.
This study is focused on the mechanical characterization of materials used in microelectronic and micro- electromechanical systems (MEMS) devices. In order to determine their mechanical parameters, a new deformation bench test with suitable micromachined specimens have been developed. Uniaxial tensile tests were performed on low cost specimens, consisting in electroplated thin copper films and structures, deposited on a polimide type substrate. Moreover, a cyclic mechanical actuation via piezoelectric actuators was tested on the same deformation bench. These experiments validate the device for performing dynamic characterization of materials, and reliability studies of different microstructures.
Spin-related effects in thermoelectricity can be used to design more efficient refrigerators and offer novel promising applications for the harvesting of thermal energy. The key challenge is to design structural and compositional magnetic material systems with sufficiently high efficiency and power output for transforming thermal energy into electric energy and vice versa. Here, the fabrication of large-area 3D interconnected Co/Cu nanowire networks is demonstrated, thereby enabling the controlled Peltier cooling of macroscopic electronic components with an external magnetic field. The flexible, macroscopic devices overcome inherent limitations of nanoscale magnetic structures due to insufficient power generation capability that limits the heat management applications. From properly designed experiments, large spin-dependent Seebeck and Peltier coefficients of $-9.4$ $mu$V/K and $-2.8$ mV at room temperature, respectively. The resulting power factor of Co/Cu nanowire networks at room temperature ($sim7.5$ mW/K$^2$m) is larger than those of state of the art thermoelectric materials, such as BiTe alloys and the magneto-power factor ratio reaches about 100% over a wide temperature range. Validation of magnetic control of heat flow achieved by taking advantage of the spin-dependent thermoelectric properties of flexible macroscopic nanowire networks lay the groundwork to design shapeable thermoelectric coolers exploiting the spin degree of freedom.