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A micro-electro-mechanical system vibrating in its shear mode was used to study the viscosity of normal liquid $^3$He from 20mK to 770mK at 3bar, 21bar, and 29bar. The damping coefficient of the oscillator was determined by frequency sweeps through its resonance at each temperature. Using a slide film damping model, the viscosity of the fluid was obtained. Our viscosity values are compared with previous measurements and with calculated values from Fermi liquid theory. The crossover from the classical to the Fermi liquid regime is manifest in the temperature dependence of viscosity. In the Fermi liquid regime, the temperature dependence of viscosity changes from $T^{-1}$ to $T^{-2}$ on cooling, indicating a transition from the Stokes flow to the Couette flow regime.
The mechanical resonance properties of a micro-electro-mechanical oscillator with a gap of 1.25 $mu$m was studied in superfluid $^3$He-B at various pressures. The oscillator was driven in the linear damping regime where the damping coefficient is ind
We report a comprehensive investigation of the effects of quantum turbulence and quantized vorticity in superfluid $^4$He on the motion of a micro-electromechanical systems (MEMS) resonator. We find that the MEMS is uniquely sensitive to quantum turb
Ultralow dissipation plays an important role in sensing applications and exploring macroscopic quantum phenomena using micro-and nano-mechanical systems. We report a diamagnetic-levitated micro-mechanical oscillator operating at a low temperature of
We demonstrate an accurate method to control the motion of a micromechanical oscillator in contact with a thermal bath. The experiment is carried out on the cantilever tip of an Atomic Force Microscope (AFM). Applying an appropriate time dependent ex
Recent studies of turbulence in superfluid Helium indicate that turbulence in quantum fluids obeys a Kolmogorov scaling law. Such a law was previously attributed to classical solutions of the Navier-Stokes equations of motion. It is suggested that tu